Download A Guide to Hands-on MEMS Design and Prototyping by Kubby PDF

By Kubby

even if you're a pupil taking an introductory MEMS direction or a training engineer who must wake up to hurry quick on MEMS layout, this sensible advisor offers the hands-on adventure had to layout, fabricate and attempt MEMS units. you are going to how to use foundry multi-project fabrication strategies for reasonably cheap MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a number of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, in addition to workouts and layout demanding situations on the finish of each bankruptcy. recommendations to the layout problem difficulties are supplied online.

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