Download Characterization in Silicon Processing (Materials by Yale E. Strausser PDF

By Yale E. Strausser

With a spotlight at the use of fabrics characterization options for silicon-based semiconductors, this quantity within the fabrics Characterization sequence specializes in the method circulation of silicon wafer manufacture the place fabrics houses, processing and linked difficulties are delivered to the fore. The ebook is geared up through the categories of fabrics mostly linked to built-in silicon semiconductor circuits and the common techniques concerned for every such fabric, together with deposition, thermal therapy, and lithography. Readers will locate positive aspects similar to: -- the basic methods of Silicon Epitaxial progress -- insurance of Polysilicon Conductors, Silicides, Aluminum- and Copper-based Conductors, Tungsten-based Conductors -- Concise summaries of significant characterization applied sciences for silicon and similar semiconductor fabrics, together with Auger Electron Spectroscopy, Energy-Dispersive X-Ray Spectroscopy, Neutron Activation research and Raman Spectroscopy

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