By Yannick Le Tiec
Microelectronics is a fancy global the place many sciences have to collaborate to create nano-objects: we want services in electronics, microelectronics, physics, optics and mechanics additionally crossing into chemistry, electrochemistry, in addition to biology, biochemistry and drugs. Chemistry is curious about many fields from fabrics, chemical compounds, gases, beverages or salts, the fundamentals of reactions and equilibrium, to the optimized cleansing of surfaces and selective etching of particular layers. moreover, over contemporary a long time, the scale of the transistors has been greatly lowered whereas the performance of circuits has elevated. This ebook comprises 5 chapters masking the chemical substances and sequences utilized in processing, from cleansing to etching, the position and effect in their purity, besides the fabrics utilized in “Front finish Of the road” which corresponds to the guts and function of person transistors, then relocating directly to the “Back finish Of the road” that is relating to the interconnection of all of the transistors. eventually, the necessity for particular functionalization additionally calls for key wisdom on floor remedies and chemical administration to permit new applications.
1. Chemistry within the “Front finish of the road” (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec.
2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis.
three. The Chemistry of rainy floor education: cleansing, Etching and Drying, Yannick Le Tiec and Martin Knotter.
four. The Use and administration of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti.
five. floor Functionalization for Micro- and Nanosystems: software to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet.
About the Authors
Yannick Le Tiec is a technical specialist at CEA-Leti, Minatec given that 2002. he's a CEA-Leti assignee at IBM, Albany (NY) to improve the complicated 14 nm CMOS node and the FDSOI know-how. He held diverse technical positions from the complicated three hundred mm SOI CMOS pilot line to diverse assignments inside of SOITEC for complicated wafer improvement and later inside of INES to optimize sunlight telephone ramp-up and yield. He has been a part of the ITRS entrance finish technical operating crew at ITRS considering that 2008.
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