By Xu Ma,Gonzalo R. Arce
Optical lithography is without doubt one of the such a lot hard parts of present built-in circuit production know-how. The semiconductor is depending extra on answer enhancement suggestions (RETs), due to the fact their implementation doesn't require major alterations in fabrication infrastructure. Computational Lithography is the 1st ebook to deal with the computational optimization of RETs in optical lithography, supplying an in-depth dialogue of optimum optical proximity correction (OPC), part transferring masks (PSM), and off-axis illumination (OAI) RET instruments that use model-based mathematical optimization approaches.
The publication begins with an advent to optical lithography platforms, electrical magnetic box rules, and the basics of optimization from a mathematical standpoint. It is going directly to describe intimately kinds of optimization algorithms to enforce RETs. lots of the algorithms constructed are according to the applying of the OPC, PSM, and OAI ways and their combos. Algorithms for coherent illumination in addition to in part coherent illumination structures are defined, and diverse simulations are provided to demonstrate the effectiveness of the algorithms. additionally, mathematical derivations of all optimization frameworks are presented.
The accompanying MATLAB® software program documents for the entire RET tools defined within the booklet make it effortless for readers to run and examine the codes as a way to comprehend and practice the optimization algorithms, in addition to to layout a collection of optimum lithography mask. The codes can also be utilized by readers for his or her examine and improvement actions of their educational or commercial organisations. An accompanying MATLAB® software program advisor can be integrated. An accompanying MATLAB® software program advisor is incorporated, and readers can obtain the software program to exploit with the advisor at ftp://ftp.wiley.com/public/sci_tech_med/computational_lithography.
Tailored for either entry-level and skilled readers, Computational Lithography is intended for school, graduate scholars, and researchers, in addition to scientists and engineers in business businesses whose learn or profession box is semiconductor IC fabrication, optical lithography, and RETs. Computational lithography attracts from the wealthy concept of inverse difficulties, optics, optimization, and computational imaging; as such, the ebook is usually directed to researchers and practitioners in those fields.
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